Bubuka wafer carrier
KATEGORI PRODUK
▶Wafer Carrier System pikeun PECVD & Prosés TALOX
• Parahu Grafit PECVD & TALOX (M4~M12)
• Nangtung SM-Parahu (M4, M6)
• Implant & pancuran Bagéan Grafit (M4~M6)
• C / C Dulang & palapis keramik
• Metal RIE-Tray & palapis keramik
• vakum Sealing: O-Ring & SQ-Ring
▶Texturing & Prosés Transfer Etching baseuh
• LSC H-Carrier atawa kaset (M4~M12)
• LSC V-Carrier atawa kaset (M4~M12)
• ASC Carrier atawa kaset (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• kabayang angkutan (Roller) Series
▶Carrier sél surya & Metal Carrier
• TRC Carrier atawa kaset (M4~M12)
• Majalah (kalayan BELT)
Parahu grafit (Tipe-H)
19P6-216CT (WF M4~M12)
Parahu grafit (Tipe-H)
21P6-240CT WF M4~M12)
Parahu grafit (Tipe-H)
23P7-308CT(W/F M4~M12)
Parahu grafit (Tipe-H)
22P/7-294TP (W/F M4~M12)
Parahu grafit (Tipe-H)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARIER & KOTAK PENYIMPANAN (~M12)
C/C TRAY atawa CARRIER (M4~M10)
C/C TRAY atawa CARRIER (M4~M10)
Parahu nangtung (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
CARRIER ASC (~M6)
TRC CARIER(~M12)
TRC CARIER(~M12)
GRAFIT-Parahu (M12)
Wafer Carrier System pikeun Prosés PECVD
▶ Parahu grafit (CT-Dirancang) M10 / M12 Prosés
• konsép design husus
▶ Parahu grafit (CT-Dirancang) M4 / M6 Prosés
▶ Bagian aksésori parahu
▶ nangtung parahu-161,7mm WAFER
▶ nangtung parahu-166mm WAFER
▶ Parahu nangtung-161.7mm, 166mm WAFER
Carrier sél surya & Metal TRC Carrier
JENIS: Otomatisasi
UKURAN WAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
Pamakéan: Mawa (Kaset)
KAPASITAS : 100 lembar
Jangkungna: 4.76mm / 5.953mm / 6.35mm
DIMENSI: Kira-kira 559 × 220 × 220 MM
Kira-kira 712×260×260MM
Kaunggulan: Suasana
BAHAN: SUNUH, SISI BAR-Aluminium (anodizing)
SIDE PLAT-POM (Antistatik)
Panutup palang handap-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
Pancuran piring & implan, CARRIER
